Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration

Capacitance Extraction from Complex 3D Interconnect Structures

Authors:D. Cartwright, G. Csanak, D. George, R. Walker, A. Kuprat, A. Dengi and W. Grobman
Affilation:Los Alamos National Laboratory, US
Pages:159 - 162
Keywords:capacitance extraction, interconnects, dielectrics, finite element, unstructured grid
Abstract:A new tool has been developed for calculating the capacitance matrix for complex 3D interconnect structures involving multiple layers of irregularly shaped interconnect, imbedded in different dielectric materials. This method utilizes a new 3D adaptive unstructured grid capability, and a linear finite element algorighm. The capacitance is determined from the minimum in the total system energy as the nodes are varied to minimize the error in the electric field in the dielectric(s).
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