Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration

Reduced-Order Modeling of Lorentz Force Actuation with Modal Basis Functions

Authors:M. Varghese, V.L. Rabinovich and S.D. Senturia
Affilation:Massachusetts Institute of Technology, US
Pages:155 - 158
Keywords:macro-model, energy method, MEMS, Lorentz force, magnetics
Abstract:We present a method for generating dynamic reduced-order models for Lorentz force actuation in microelectromechanical systems (MEMS). These models, derived from a set of meshed simulations, are analytical representations of the magnetic co-energy of a system. The representations are expressed as functions of harmonic mode amplitudes. By calculating analytical gradients of the co-energy with respect to the mode amplitudes, we find the Lorentz forces. Magnetic and mechanical energy domains are then coupled together by inserting Lorentz forces and mechanical forces into modal equations of motion.
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