Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
 
Chapter 6: Characterization, Parameter Extraction, Calibration
 

Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling

Authors:E.K. Chan, K. Garikipati and R.W. Dutton
Affilation:Stanford University, US
Pages:194 - 197
Keywords:calibration, electromechanical, simulation
Abstract:The entire process of calibrating an electromechanical simulator ñ identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device ñ is presented. The simulation model for electrostatically-actuated beams is calibrated to a wide range of electrical and optical test structure measurements and is then used to predict the behavior of more complex dual-bias-electrode structures. Various mechanical discontinuities, and post-buckled pull-in behavior are addressed explicitly. Arbitrary fitting coefficients that limit generality are avoided. The well-characterized behavior of the dual-electrode structures can serve as verification test cases for evaluating coupled electromechanical simulators.
Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and BucklingView PDF of paper
ISBN:0-9666135-4-6
Pages:697
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