MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 6

Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling

Authors: E.K. Chan, K. Garikipati and R.W. Dutton

Affilation: Stanford University, United States

Pages: 194 - 197

Keywords: calibration, electromechanical, simulation

Abstract:
The entire process of calibrating an electromechanical simulator ñ identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device ñ is presented. The simulation model for electrostatically-actuated beams is calibrated to a wide range of electrical and optical test structure measurements and is then used to predict the behavior of more complex dual-bias-electrode structures. Various mechanical discontinuities, and post-buckled pull-in behavior are addressed explicitly. Arbitrary fitting coefficients that limit generality are avoided. The well-characterized behavior of the dual-electrode structures can serve as verification test cases for evaluating coupled electromechanical simulators.


ISBN: 0-9666135-4-6
Pages: 697

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