Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration

Parameter Extraction for a Microwave Micromachined Switch

Authors:J. Chen, K.M. Coperich, S-M Kang and J. Schutt-Aine
Affilation:University of Illinois at Urbana-Champaign, US
Pages:190 - 193
Keywords:micromechanical switch, transient simulation, S-parameter, modeling
Abstract:This paper details new parameter extraction methods for microwave micromachined switches. Speciffically new methods for extracting switch turn-on and turn-off transient behavior and switch electromagnetic behavior are discussed. The accuracy of these methods are verified by comparison between simulation results and experimental measurements.
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