![]() | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration |
Parameter Extraction for a Microwave Micromachined Switch | |
| Authors: | J. Chen, K.M. Coperich, S-M Kang and J. Schutt-Aine |
| Affilation: | University of Illinois at Urbana-Champaign, US |
| Pages: | 190 - 193 |
| Keywords: | micromechanical switch, transient simulation, S-parameter, modeling |
| Abstract: | This paper details new parameter extraction methods for microwave micromachined switches. Speciffically new methods for extracting switch turn-on and turn-off transient behavior and switch electromagnetic behavior are discussed. The accuracy of these methods are verified by comparison between simulation results and experimental measurements. |
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| ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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