Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
 
Chapter 6: Characterization, Parameter Extraction, Calibration
 

Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET and Non-Parametric Fitting

Authors:S.B. Crary, P. Cousseau, D. Armstrong, D.M. Woodcock, O. Dubochet, P. Lerch and Ph. Renaud
Affilation:University of Michigan, US
Pages:184 - 189
Keywords:MEMS, I-optimality, I-OPT, silicon flow sensor, design of experiments
Abstract:We present a new and unique software program, IMSET, capable of finding optimal designs for computer experiments. A finite-element simulation of a micro-machined flow sensor was used to illustrate macromodel generation and to compare the quality of the IMSET design with other approaches. Coupled with an appropriate analysis, IMSET provides a highly efficient means of non-parametric macromodel generation. IMSET is available on the World-Wide Web.
Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET and Non-Parametric FittingView PDF of paper
ISBN:0-9666135-4-6
Pages:697
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