MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 6

Acceleration of Inductance Extraction by Means of the Monte Carlo Method
G. Leonhardt and W. Fichtner
Swiss Federal Institute of Technology, CH

Accurate Inductance Extraction with Permeable Materials Using Qualocation
Y. Massoud, J. Wang and J.K. White
Massachusetts Institute of Technology, US

Reduced-Order Modeling of Lorentz Force Actuation with Modal Basis Functions
M. Varghese, V.L. Rabinovich and S.D. Senturia
Massachusetts Institute of Technology, US

Capacitance Extraction from Complex 3D Interconnect Structures
D. Cartwright, G. Csanak, D. George, R. Walker, A. Kuprat, A. Dengi and W. Grobman
Los Alamos National Laboratory, US

A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems
M.H. Zaman, S.F. Bart, V.L. Rabinovich, C.K. Ghaddar, I. Tchertkov and J.R. Gilbert
Microcosm Technologies, Inc., US

A Wide Frequency Range Surface Integral Formulation for 3-D Inductance and Resistance Extraction
J. Wang, J. Tausch and J.K. White
Massachusetts Institute of Technology, US

Simple ADPL Implementation of a 3D FEM Simulator for Mutual Capacitances of Arbitrarily Shaped Objects Like Interconnects
A. Hieke
Siemens Microelectronics, US

Extraction of Compact Model Parameters for ULSI MOSFETs Using a Genetic Algorithm
J. Watts, C. Bittner, D. Heaberlin and J. Hoffman
IBM Microelectronics Division, US

Modelling Calibration and Validation of Contributions to Stress in the STI Process Sequence
K. Garikipati, V.S. Rao, M.Y. Hao, E. Ibok, I. De Wolf and R.W. Dutton
Stanford University, US

Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET and Non-Parametric Fitting
S.B. Crary, P. Cousseau, D. Armstrong, D.M. Woodcock, O. Dubochet, P. Lerch and Ph. Renaud
University of Michigan, US

Parameter Extraction for a Microwave Micromachined Switch
J. Chen, K.M. Coperich, S-M Kang and J. Schutt-Aine
University of Illinois at Urbana-Champaign, US

Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling
E.K. Chan, K. Garikipati and R.W. Dutton
Stanford University, US

Numerical and Analytical Modeling of the Piezoelectric Transformer and Experimental Verification
S. Hallaert, E. Sarraute and B. Le Pioufle
URA CNRS 1375, FR

SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing
T. Tatsumi, H. Ansai, M. Mukai and Y. Komatsu
Sony Corporation, JP

IMAP: Interferometry for Material Property Measurement in MEMS
B.D. Jensen, M.P. de Boer and S.L. Miller
Sandia National Laboratory, US

MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000
A. Gutierrez, S. Aceto, M. Simkulet, D. Patti, M. Liendhard, T. Krawczyk and A. Lundgren
InterScience, Inc, US

HEMT Optimization by Advanced RSM Models
M.D. Profirescu, G. Dima, B. Govoreanu and O. Mitrea
University Politehnica of Bucharest, RO


ISBN: 0-9666135-4-6
Pages: 697