Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Chapter 6:

Characterization, Parameter Extraction, Calibration

-Acceleration of Inductance Extraction by Means of the Monte Carlo Method
 G. Leonhardt and W. Fichtner
 Swiss Federal Institute of Technology, CH
-Accurate Inductance Extraction with Permeable Materials Using Qualocation
 Y. Massoud, J. Wang and J.K. White
 Massachusetts Institute of Technology, US
-Reduced-Order Modeling of Lorentz Force Actuation with Modal Basis Functions
 M. Varghese, V.L. Rabinovich and S.D. Senturia
 Massachusetts Institute of Technology, US
-Capacitance Extraction from Complex 3D Interconnect Structures
 D. Cartwright, G. Csanak, D. George, R. Walker, A. Kuprat, A. Dengi and W. Grobman
 Los Alamos National Laboratory, US
-A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems
 M.H. Zaman, S.F. Bart, V.L. Rabinovich, C.K. Ghaddar, I. Tchertkov and J.R. Gilbert
 Microcosm Technologies, Inc., US
-A Wide Frequency Range Surface Integral Formulation for 3-D Inductance and Resistance Extraction
 J. Wang, J. Tausch and J.K. White
 Massachusetts Institute of Technology, US
-Simple ADPL Implementation of a 3D FEM Simulator for Mutual Capacitances of Arbitrarily Shaped Objects Like Interconnects
 A. Hieke
 Siemens Microelectronics, US
-Extraction of Compact Model Parameters for ULSI MOSFETs Using a Genetic Algorithm
 J. Watts, C. Bittner, D. Heaberlin and J. Hoffman
 IBM Microelectronics Division, US
-Modelling Calibration and Validation of Contributions to Stress in the STI Process Sequence
 K. Garikipati, V.S. Rao, M.Y. Hao, E. Ibok, I. De Wolf and R.W. Dutton
 Stanford University, US
-Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET and Non-Parametric Fitting
 S.B. Crary, P. Cousseau, D. Armstrong, D.M. Woodcock, O. Dubochet, P. Lerch and Ph. Renaud
 University of Michigan, US
-Parameter Extraction for a Microwave Micromachined Switch
 J. Chen, K.M. Coperich, S-M Kang and J. Schutt-Aine
 University of Illinois at Urbana-Champaign, US
-Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling
 E.K. Chan, K. Garikipati and R.W. Dutton
 Stanford University, US
-Numerical and Analytical Modeling of the Piezoelectric Transformer and Experimental Verification
 S. Hallaert, E. Sarraute and B. Le Pioufle
 URA CNRS 1375, FR
-SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing
 T. Tatsumi, H. Ansai, M. Mukai and Y. Komatsu
 Sony Corporation, JP
-IMAP: Interferometry for Material Property Measurement in MEMS
 B.D. Jensen, M.P. de Boer and S.L. Miller
 Sandia National Laboratory, US
-MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000
 A. Gutierrez, S. Aceto, M. Simkulet, D. Patti, M. Liendhard, T. Krawczyk and A. Lundgren
 InterScience, Inc, US
-HEMT Optimization by Advanced RSM Models
 M.D. Profirescu, G. Dima, B. Govoreanu and O. Mitrea
 University Politehnica of Bucharest, RO
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