MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling Chapter 5

MEMS Component Extraction

Authors: B. Baidya, S.K. Gupta and T. Mukherjee

Affilation: Carnegie Mellon University, United States

Pages: 143 - 146

Keywords: MEMS, canonical representation, component extraction, comb drives, springs, lumped parameter model

Surface micromachined structures are composed of atomic elements like anchors, beams and fingers, which can be further grouped into components like springs, comb drives and plates. Automatic recognition of these elements and com-ponents is crucial for a structured design methodology in MEMS (Microelectromechanical system). As MEMS design tends to be layout-centric, design evaluation requires extrac-tion of the atomic elements from the layout. Furthermore, MEMS component extraction reduces the size of the simula-tion problem, enabling efficient design evaluation. An improved extraction module has been developed for compo-nent extraction that generates the netlist of the schematic cor-responding to the layout. An ordinary differential equation solver combined with component models can then be used for efficient functional verification of the layout by simulating the extracted netlist. The utility of the extractor is demonstrated for a variety of MEMS devices composed of different types of springs and electrostatic actuators and sensors. Simulation time for the extracted netlist decreased by a factor of 10 when component extraction and component models were used com-pared to a netlist of only atomic elements. anchors, plate masses, beams, cantilever beams, joints and holes. In this paper, we describe the extraction of components such as springs and electromechanical comb transducers after briefly discussing the algorithms that were used for recogni-tion of atomic elements.

MEMS Component Extraction

ISBN: 0-9666135-4-6
Pages: 697