MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling Chapter 5

Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS

Authors: A. Dewey, H. Dussault, J.P. Hanna, E. Christen, G.K. Fedder, B.F. Romanowicz and M.A. Maher

Affilation: Duke University, United States

Pages: 139 - 142

Keywords: MEMS, component modeling, AHDL, VHDL-AMS, composite microsystems

This paper presents an approach to defining and characterising component models that promotes the establishement of reusable intellectual property (IP) for microelectromechanical systems (MEMS), in particular, and composite microsystems, in general. System dynamic behavior is mathematically characterized as coupled sets of ordinary algebraic and differential equations (DAEs), using the basic laws of conservation of energy governing electrical and mechanical networks combined with branch constitutive relations (BCRs) governing network elements. The ordinary algebraic and differential equations are described in the behavioral analog hardware description language (AHDL) VHDL-AMS, using a common modeling methodology and associated set of constructs. An example composite system model is given of an electromechanical loudspeaker.

ISBN: 0-9666135-4-6
Pages: 697

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