Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
 
Chapter 5: System-Level Modeling
 

MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis

Authors:E. Sacks and J. Allen
Affilation:Purdue University, US
Pages:136 - 138
Keywords:MEMS, micro-mechanical design, configuration space, Summit
Abstract:We have developed an interactive computer-aided design program that supports mechanical design of devices fabri-cated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation, and sup-ports functional parametric design. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to detect and correct a design flaw in a micro-mechanical indexing mechanism fabricated at Sandia with the SUMMiT process.
MEMS Functional Validation Using the Configuration Space Approach to Simulation and AnalysisView PDF of paper
ISBN:0-9666135-4-6
Pages:697
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