MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling Chapter 5

MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis

Authors: E. Sacks and J. Allen

Affilation: Purdue University, United States

Pages: 136 - 138

Keywords: MEMS, micro-mechanical design, configuration space, Summit

Abstract:
We have developed an interactive computer-aided design program that supports mechanical design of devices fabri-cated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation, and sup-ports functional parametric design. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to detect and correct a design flaw in a micro-mechanical indexing mechanism fabricated at Sandia with the SUMMiT process.

MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis

ISBN: 0-9666135-4-6
Pages: 697