MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling Chapter 5

Modeling of Electrostatic MEMS Components

Authors: G. Lorenz, R. Neul and S. Dickmann

Affilation: Robert Bosch GmbH, Germany

Pages: 128 - 131

Keywords: network-type modeling, MEMS, SABER, comb model, conformal mapping

This paper describes an analytical approach for the network-type modeling of pull-in comb drives based on a mathematical field description using conformal mapping methods. The model was coded in MAST R for the SABER R simulator and its accuracy was compared to FDM and boundary element simulations using MAFIA and MEMCAD. This approach leads to a library of network-type multi domain component models for the system simulation of MEMS, providing nearly the accuracy of field-solving codes at network-type simulation speed.

Modeling of Electrostatic MEMS Components

ISBN: 0-9666135-4-6
Pages: 697