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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 5: System-Level Modeling |
| | Modeling of Electrostatic MEMS Components | | Authors: | G. Lorenz, R. Neul and S. Dickmann | | Affilation: | Robert Bosch GmbH, Germany | | Pages: | 128 - 131 | | Keywords: | network-type modeling, MEMS, SABER, comb model, conformal mapping | | Abstract: | This paper describes an analytical approach for the network-type modeling of pull-in comb drives based on a mathematical field description using conformal mapping methods. The model was coded in MAST R for the SABER R simulator and its accuracy was compared to FDM and boundary element simulations using MAFIA and MEMCAD. This approach leads to a library of network-type multi domain component models for the system simulation of MEMS, providing nearly the accuracy of field-solving codes at network-type simulation speed. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
| Hardcopy: | $100.00 |
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