Modeling of Electrostatic MEMS Components

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 5: System-Level Modeling
	Modeling of Electrostatic MEMS Components
Authors:	G. Lorenz, R. Neul and S. Dickmann
Affilation:	Robert Bosch GmbH, DE
Pages:	128 - 131
Keywords:	network-type modeling, MEMS, SABER, comb model, conformal mapping
Abstract:	This paper describes an analytical approach for the network-type modeling of pull-in comb drives based on a mathematical field description using conformal mapping methods. The model was coded in MAST R for the SABER R simulator and its accuracy was compared to FDM and boundary element simulations using MAFIA and MEMCAD. This approach leads to a library of network-type multi domain component models for the system simulation of MEMS, providing nearly the accuracy of field-solving codes at network-type simulation speed.
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ISBN:	0-9666135-4-6
Pages:	697
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