Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Chapter 5:

System-Level Modeling

-Modeling of Electrostatic MEMS Components
 G. Lorenz, R. Neul and S. Dickmann
 Robert Bosch GmbH, DE
-A Common Basis for Mixed-Technology Micro-System Modeling
 J.P. Hanna and R.G. Hillman
 Air Force Research Laboratory, US
-MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis
 E. Sacks and J. Allen
 Purdue University, US
-Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS
 A. Dewey, H. Dussault, J.P. Hanna, E. Christen, G.K. Fedder, B.F. Romanowicz and M.A. Maher
 Duke University, US
-MEMS Component Extraction
 B. Baidya, S.K. Gupta and T. Mukherjee
 Carnegie Mellon University, US
ISBN:0-9666135-4-6
Pages:697
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