MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Process Modeling Chapter 4

Laser Induced Surface Modification of Ceramic Substrates for Thermal and Electric Lines in Microsystems: Modeling Compared to Experiment

Authors: H. Gruhn, R. Heidinger, M. Rohde, S. Rüdinger, J. Schneider and K.-H. Zum Gahr

Affilation: Forschungszentrum Karlsruhe, Germany

Pages: 105 - 108

Keywords: laser induced surface modification, finite element simulation, ceramics

Laser induced surface modification has been used to fabricate conducting paths in ceramic substrates. For the purpose of process simulation and prediction of process parameters a finite element model has been developed to simulate the thermal behaviour of the substrate during laser surface interaction. The results of the model calculation have been completely verified experimentally for alumina substrates. Using this model the width and the depth of the fabricated lines could be predicted as a function of the laser power and velocity. First results are presented for Cordierite substrates. Further developments will consider different ceramic substrates such as PZT.

ISBN: 0-9666135-4-6
Pages: 697

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