Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 3: Computational Materials

Modeling of Oxynitride-Si System Based on Reflected Spectra

Authors:K.J. Plucinski, F. Lhomme and I.V. Kityk
Affilation:Military University of Technology, PL
Pages:83 - 86
Keywords:amorphous thin films, silicon oxynitride
Abstract:Using ab initio molecular dynamics simulation with simultaneous quantum chemical calculations we propose a new experimental method of contact-less control of the O/N ratio in SiON films on Si<111> surfaces. The proposed method consists of direct measurements of reflected light coefficients for the parallel Rp and perpendicular Rs light polarizations in relation to the Si<111> plane. We have shown that the spectral dependence of the anisotropic ratio P=Rs/Rp is closely connected to the O/N ratio. Independently performed experimental spectra measurements correspond well with experimental data. We demonstrate significant advantages over ellipsometry, XPS and other measurements both in precision as well as in technical implementation.
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