MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Computational Materials Chapter 3

Modeling of Oxynitride-Si System Based on Reflected Spectra

Authors: K.J. Plucinski, F. Lhomme and I.V. Kityk

Affilation: Military University of Technology, Poland

Pages: 83 - 86

Keywords: amorphous thin films, silicon oxynitride

Using ab initio molecular dynamics simulation with simultaneous quantum chemical calculations we propose a new experimental method of contact-less control of the O/N ratio in SiON films on Si<111> surfaces. The proposed method consists of direct measurements of reflected light coefficients for the parallel Rp and perpendicular Rs light polarizations in relation to the Si<111> plane. We have shown that the spectral dependence of the anisotropic ratio P=Rs/Rp is closely connected to the O/N ratio. Independently performed experimental spectra measurements correspond well with experimental data. We demonstrate significant advantages over ellipsometry, XPS and other measurements both in precision as well as in technical implementation.

Modeling of Oxynitride-Si System Based on Reflected Spectra

ISBN: 0-9666135-4-6
Pages: 697