Authors: T.P. Kurzweg, S.P. Levitan, P.J. Marchand, K.R. Prough and D.M. Chiarulli
Affilation: University of Pittsburgh, United States
Pages: 687 - 690
Keywords: MEMS-CAD, optical MEMS, MOEMS, micro-optics
The use of MEMs technology has enabled the fabrica-tion of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our free-space opto-electronic system CAD tool, Chatoyant, to meet the needs of optical MEMS designers. This paper presents new analysis tech-niques which extend our tool to support optical MEM sys-tem design. We demonstrate these extensions with the analysis of a 1x2 micro-optical MEM interferometer switch.