 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 19: Applications: Electromagnetics, Optics, Imaging |
CAD for Opto-Electronic Microsystems | |
| Authors: | T.P. Kurzweg, S.P. Levitan, P.J. Marchand, K.R. Prough and D.M. Chiarulli |
| Affilation: | University of Pittsburgh, US |
| Pages: | 687 - 690 |
| Keywords: | MEMS-CAD, optical MEMS, MOEMS, micro-optics |
| Abstract: | The use of MEMs technology has enabled the fabrica-tion of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our free-space opto-electronic system CAD tool, Chatoyant, to meet the needs of optical MEMS designers. This paper presents new analysis tech-niques which extend our tool to support optical MEM sys-tem design. We demonstrate these extensions with the analysis of a 1x2 micro-optical MEM interferometer switch. |
 | View PDF of paper |
| ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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