Authors: R. Thalhammer, F. Hille, P. Scheubert and G. Wachutka
Affilation: Münich University of Technology, Germany
Pages: 683 - 686
Keywords: simulation of laser probing techniques, electro-thermal simulation, modeling of beam propagation, thermo-optical effect, electro-optical effect
The complex refractive index in semiconductors depends on several electrical, thermal, and mechanical state variables, e. g. carrier concentrations, lattice temperature, or mechanical stress. Making use of these dependencies, various internal laser probing techniques and optical microsensors have been proposed. In this work, we present aphysically rigorous simulation strategy for the complete measurement procedure of laser probes, which is equally applicable to optical micro- sensors. It includes a self-consistent electro-thermal device simulation, the calculation of the resulting modulation of the refractive index, and the calculation of the beam propagation through the device under test, the lenses and the aperture holes. As an application example, simulation results for laser de ection measurements are discussed.