MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Applications: Electromagnetics, Optics, Imaging Chapter 19

Physically Rigorous Modeling of Sensing Techniques Exploiting the Thermo-Optical and Electro-Optical Effect

Authors: R. Thalhammer, F. Hille, P. Scheubert and G. Wachutka

Affilation: Münich University of Technology, Germany

Pages: 683 - 686

Keywords: simulation of laser probing techniques, electro-thermal simulation, modeling of beam propagation, thermo-optical effect, electro-optical effect

The complex refractive index in semiconductors depends on several electrical, thermal, and mechanical state variables, e. g. carrier concentrations, lattice temperature, or mechanical stress. Making use of these dependencies, various internal laser probing techniques and optical microsensors have been proposed. In this work, we present aphysically rigorous simulation strategy for the complete measurement procedure of laser probes, which is equally applicable to optical micro- sensors. It includes a self-consistent electro-thermal device simulation, the calculation of the resulting modulation of the refractive index, and the calculation of the beam propagation through the device under test, the lenses and the aperture holes. As an application example, simulation results for laser de ection measurements are discussed.

ISBN: 0-9666135-4-6
Pages: 697

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