Authors: M.I. Kilani, C.J. Chen, Y. Haik and V. Pai
Affilation: FAMU-FSU College of Engineering, United States
Pages: 675 - 678
Keywords: icroelectromechanical systems, magnetically driven systems
The dynamic behavior of magnetically driven microsystems is investigated in this study. An experimental setup designed to simulate the dynamic response of a micro-roller element moving in rectilinear path under influence of an external magnetic field is presented. Results of element response to step excitation field are discussed and an analytical model for the response based on a lumped capacitance model is proposed. A computer simulation of the proposed model was also conducted and the results of dynamic response to step input were compared with those obtained experimentally.