Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 18: Applications: Micropumps, Heaters, Coolers

Development of CAD Model for MEMS Micropumps

Authors:M. Arik, S.M. Zurn, A. Bar-Cohen, Y. Nam, D. Markus and D. Polla
Affilation:Univeristy of Minnesota, US
Pages:651 - 654
Keywords:CAD model, Finite element analyses, PZT cantilever beam, Atomic force microscope
Abstract:This paper describes development of a Computer Aided Design Model for MicroElectroMechanical Systems. Finite Element Analyses have been completed successfully to understand the physical nature of the sample MEMS devices. Numerical results have been supported by analytical calculations in terms of the displacement, impedance, modular and harmonic analyses. A set of piezoelectrically actuated cantilever beams have been fabricated at the Microtechnology Laboratory of the University of Minnesota. Numerical results well compared with the experimental findings.
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