Authors: M. Arik, S.M. Zurn, A. Bar-Cohen, Y. Nam, D. Markus and D. Polla
Affilation: Univeristy of Minnesota, United States
Pages: 651 - 654
Keywords: CAD model, Finite element analyses, PZT cantilever beam, Atomic force microscope
This paper describes development of a Computer Aided Design Model for MicroElectroMechanical Systems. Finite Element Analyses have been completed successfully to understand the physical nature of the sample MEMS devices. Numerical results have been supported by analytical calculations in terms of the displacement, impedance, modular and harmonic analyses. A set of piezoelectrically actuated cantilever beams have been fabricated at the Microtechnology Laboratory of the University of Minnesota. Numerical results well compared with the experimental findings.