MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Applications: Pressure, Actuation, Navigation Chapter 17

Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections

Authors: A. Shkel, R.T. Howe, R. Horowitz

Affilation: University of California-Berkeley, United States

Pages: 605 - 608

Keywords: micromachined gyroscopes, fabrication defects, anisoelasticity, damping, motion decomposition

Abstract:
This paper studies behavior of non-ideal vibratory micromachined gyroscopes. The use of methods of motion decomposition [1] is the essence of the proposed analytical approach. The method is based on partitioning the equations of motion on fractions which are changing in different time scales. The approach allows rapid simulation of the long-term response of the gyroscope in presence of imperfections. The central result of the paper is the classification of errors in accordance with their in uence on the gyroscope behavior.

Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections

ISBN: 0-9666135-4-6
Pages: 697