Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
 
Chapter 17: Applications: Pressure, Actuation, Navigation
 

Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections

Authors:A. Shkel, R.T. Howe, R. Horowitz
Affilation:University of California-Berkeley, US
Pages:605 - 608
Keywords:micromachined gyroscopes, fabrication defects, anisoelasticity, damping, motion decomposition
Abstract:This paper studies behavior of non-ideal vibratory micromachined gyroscopes. The use of methods of motion decomposition [1] is the essence of the proposed analytical approach. The method is based on partitioning the equations of motion on fractions which are changing in different time scales. The approach allows rapid simulation of the long-term response of the gyroscope in presence of imperfections. The central result of the paper is the classification of errors in accordance with their in uence on the gyroscope behavior.
Modeling and Simulation of Micromachined Gyroscopes in the Presence of ImperfectionsView PDF of paper
ISBN:0-9666135-4-6
Pages:697
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