Authors: W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer
Affilation: Sandia National Laboratory, United States
Pages: 640 - 643
Keywords: MEMS, microsystems, pressure sensor, diaphragm
An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and experimental data from a surface-micromachined pressure sensor.