MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Applications: Pressure, Actuation, Navigation Chapter 17

A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor

Authors: W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer

Affilation: Sandia National Laboratory, United States

Pages: 640 - 643

Keywords: MEMS, microsystems, pressure sensor, diaphragm

Abstract:
An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and experimental data from a surface-micromachined pressure sensor.

A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor

ISBN: 0-9666135-4-6
Pages: 697