A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 17: Applications: Pressure, Actuation, Navigation
	A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor
Authors:	W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer
Affilation:	Sandia National Laboratory, US
Pages:	640 - 643
Keywords:	MEMS, microsystems, pressure sensor, diaphragm
Abstract:	An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and experimental data from a surface-micromachined pressure sensor.
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ISBN:	0-9666135-4-6
Pages:	697
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