Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
 
Chapter 17: Applications: Pressure, Actuation, Navigation
 

A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor

Authors:W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer
Affilation:Sandia National Laboratory, US
Pages:640 - 643
Keywords:MEMS, microsystems, pressure sensor, diaphragm
Abstract:An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and experimental data from a surface-micromachined pressure sensor.
A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure SensorView PDF of paper
ISBN:0-9666135-4-6
Pages:697
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