Authors: P. Schmid, M. Adamschik, S. Ertl, P. Gluche and E. Kohn
Affilation: University of Ulm, Germany
Pages: 636 - 639
Keywords: diamond, CVD, stress
In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated by modeling diamond-based micro-mechanical devices and comparing the results to measurements on processed devices. All simulations were carried out using the standard simulation tool ANSYS and measured modeling parameters.