Modeling Approach for CVD-Diamond Based Mechanical Structures

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 17: Applications: Pressure, Actuation, Navigation
	Modeling Approach for CVD-Diamond Based Mechanical Structures
Authors:	P. Schmid, M. Adamschik, S. Ertl, P. Gluche and E. Kohn
Affilation:	University of Ulm, DE
Pages:	636 - 639
Keywords:	diamond, CVD, stress
Abstract:	In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated by modeling diamond-based micro-mechanical devices and comparing the results to measurements on processed devices. All simulations were carried out using the standard simulation tool ANSYS and measured modeling parameters.
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ISBN:	0-9666135-4-6
Pages:	697
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