Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Applications: Pressure, Actuation, Navigation

Modeling Approach for CVD-Diamond Based Mechanical Structures

Authors:P. Schmid, M. Adamschik, S. Ertl, P. Gluche and E. Kohn
Affilation:University of Ulm, DE
Pages:636 - 639
Keywords:diamond, CVD, stress
Abstract:In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated by modeling diamond-based micro-mechanical devices and comparing the results to measurements on processed devices. All simulations were carried out using the standard simulation tool ANSYS and measured modeling parameters.
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