Authors: S. Iyer, Y. Zhou and T. Mukherjee
Affilation: Carnegie Mellon University, United States
Pages: 632 - 635
Keywords: modeling, cross-axis coupling, micromechanical springs, lumped parameter modeling
Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range of spring dimensions for each sprint type in order to verify the moels and determine the validity range. The models for the serpentine spring are then incorporated into a macromodel for usin in nodal simulation. Improvement in simulation time using the macromodel over beam-based simulation is evaluated. Cross-axis coupling in an accelerometer structure is also simulated using this macromodel.