| |
 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Applications: Pressure, Actuation, Navigation |
| | Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs | | Authors: | S. Iyer, Y. Zhou and T. Mukherjee | | Affilation: | Carnegie Mellon University, U.S.A. | | Pages: | 632 - 635 | | Keywords: | modeling, cross-axis coupling, micromechanical springs, lumped parameter modeling | | Abstract: | Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range of spring dimensions for each sprint type in order to verify the moels and determine the validity range. The models for the serpentine spring are then incorporated into a macromodel for usin in nodal simulation. Improvement in simulation time using the macromodel over beam-based simulation is evaluated. Cross-axis coupling in an accelerometer structure is also simulated using this macromodel. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
|
| nanoPRwire™ |
 |
| News Headlines |
 |
|
|
| |
| |
|
| | |
| |
|
|
