MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Applications: Pressure, Actuation, Navigation Chapter 17

Modeling and Design Optimization of a CMOS Compatible MEMS

Authors: L. Latorre, Y. Bertrand, P. Hazard, F. Pressecq and P. Nouet

Affilation: LIRMM-CNRS, France

Pages: 620 - 623

Keywords: MEMS, magnetic field sensor, modeling, design optimization

Abstract:
Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of an elementary device, the cantilever beam. We have then used these relationships for the performance evaluation and optimization of a magnetic field sensor based on the Lorentz force actuation of a ´ U-shape ª cantilever beam.

Modeling and Design Optimization of a CMOS Compatible MEMS

ISBN: 0-9666135-4-6
Pages: 697