Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Applications: Pressure, Actuation, Navigation

Modeling and Design Optimization of a CMOS Compatible MEMS

Authors:L. Latorre, Y. Bertrand, P. Hazard, F. Pressecq and P. Nouet
Affilation:LIRMM-CNRS, FR
Pages:620 - 623
Keywords:MEMS, magnetic field sensor, modeling, design optimization
Abstract:Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of an elementary device, the cantilever beam. We have then used these relationships for the performance evaluation and optimization of a magnetic field sensor based on the Lorentz force actuation of a ´ U-shape ª cantilever beam.
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