| |
 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Applications: Pressure, Actuation, Navigation |
| | Modeling and Design Optimization of a CMOS Compatible MEMS | | Authors: | L. Latorre, Y. Bertrand, P. Hazard, F. Pressecq and P. Nouet | | Affilation: | LIRMM-CNRS, France | | Pages: | 620 - 623 | | Keywords: | MEMS, magnetic field sensor, modeling, design optimization | | Abstract: | Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of an elementary device, the cantilever beam. We have then used these relationships for the performance evaluation and optimization of a magnetic field sensor based on the Lorentz force actuation of a ´ U-shape ª cantilever beam. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
|
| Upcoming Events |
 |
 |
 |
 |
| nanoPRwire™ |
 |
| News Headlines |
 |
|
|
| |
| |
|
| | |
| |
|
|
