 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Applications: Pressure, Actuation, Navigation |
| - | Phenomenological Model for Gas Damping of High-Speed Switches |
| | D.S. Greywall, J.A. Walker, P.A Busch, S.C. Arney, D.J. Bishop, G.D. Boyd, N.J. Frigo, K.W. Goossen, P.P. Iannone, R.R. Ruel and B. Yurke |
| | Bell Laboratories, Lucent Technologies, Inc., U.S.A. |
| - | Simulation of the Production of Functional Layers for Vibration Sensors for Tool State Monitoring and Finite Element Analysis of Mechanical Characteristics |
| | J. Thomas, R. Kühnhold, R. Schnupp, G. Temmel, H. Ryssel |
| | Fraunhofer-Institut fur Integrierte Schaltungen, Germany |
| - | Oscillating Diaphragms |
| | J. McEntee and L. Bowman |
| | McEntee Engineering, U.S.A. |
| - | Analytical Modelling for Accelerometers with Electrically Tunable Sensitivity |
| | E. Cretu, M. Bartek and R.F. Wolffenbuttel |
| | Delft University of Technology, The Netherlands |
| - | Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections |
| | A. Shkel, R.T. Howe, R. Horowitz |
| | University of California-Berkeley, U.S.A. |
| - | Simulation and Optimization of Variable Capacitance (VC) Micromotors, Using Modified Parallel-Plate Model |
| | A. Salman, A. Napieralski and G. Jablonski |
| | Technical University of Lodz, Poland |
| - | Joule Heating Simulation of Poly-Silicon Thermal Micro-Actuators |
| | D.J. Silversmith and J.R. Reid |
| | Air Force Research Laboratory, U.S.A. |
| - | Fluctuating Amplitudes of Micro-Cantilever Vibration Modes |
| | A. Greiner, M. Fischer and J.G. Korvink |
| | Albert Ludwigs Universitat Frieburg, Germany |
| - | Modeling and Design Optimization of a CMOS Compatible MEMS |
| | L. Latorre, Y. Bertrand, P. Hazard, F. Pressecq and P. Nouet |
| | LIRMM-CNRS, France |
| - | Simulation of Nonideal Behaviour in Integrated Piezoresistive Silicon Pressure Sensors |
| | W. Romes, J. Muchow, S. Finkbeiner, J. Franz, O. Schatz and H-P. Trah |
| | Robert Bosch GmbH, Germany |
| - | Analytical Simulation of a 1D Single Crystal Silicon Electrostatic Micromirror |
| | H. Camon, F. Larnaudie, F. Rivoirard and B. Jammes |
| | LAAS-CNRS, France |
| - | Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs |
| | S. Iyer, Y. Zhou and T. Mukherjee |
| | Carnegie Mellon University, U.S.A. |
| - | Modeling Approach for CVD-Diamond Based Mechanical Structures |
| | P. Schmid, M. Adamschik, S. Ertl, P. Gluche and E. Kohn |
| | University of Ulm, Germany |
| - | A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor |
| | W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer |
| | Sandia National Laboratory, U.S.A. |
| - | Modeling of SiC Lateral Resonant Devices Over a Broad Temperature Range |
| | R.G. DeAnna, S. Roy, C.A. Zorman and M. Mehregany |
| | US Army Research Laboratory, U.S.A. |
| - | 3-D Finite Element Modeling Schemes for Design and Simulation of VR Microactuator |
| | A. Mohamed and M. El-Hagry |
| | Electronics Research Institute, Egypt |
| ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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