Applications: Pressure, Actuation, Navigation

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 17: Applications: Pressure, Actuation, Navigation
-	Phenomenological Model for Gas Damping of High-Speed Switches
	D.S. Greywall, J.A. Walker, P.A Busch, S.C. Arney, D.J. Bishop, G.D. Boyd, N.J. Frigo, K.W. Goossen, P.P. Iannone, R.R. Ruel and B. Yurke
	Bell Laboratories, Lucent Technologies, Inc., US
-	Simulation of the Production of Functional Layers for Vibration Sensors for Tool State Monitoring and Finite Element Analysis of Mechanical Characteristics
	J. Thomas, R. Kühnhold, R. Schnupp, G. Temmel, H. Ryssel
	Fraunhofer-Institut fur Integrierte Schaltungen, DE
-	Oscillating Diaphragms
	J. McEntee and L. Bowman
	McEntee Engineering, US
-	Analytical Modelling for Accelerometers with Electrically Tunable Sensitivity
	E. Cretu, M. Bartek and R.F. Wolffenbuttel
	Delft University of Technology, LN
-	Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections
	A. Shkel, R.T. Howe, R. Horowitz
	University of California-Berkeley, US
-	Simulation and Optimization of Variable Capacitance (VC) Micromotors, Using Modified Parallel-Plate Model
	A. Salman, A. Napieralski and G. Jablonski
	Technical University of Lodz, PL
-	Joule Heating Simulation of Poly-Silicon Thermal Micro-Actuators
	D.J. Silversmith and J.R. Reid
	Air Force Research Laboratory, US
-	Fluctuating Amplitudes of Micro-Cantilever Vibration Modes
	A. Greiner, M. Fischer and J.G. Korvink
	Albert Ludwigs Universitat Frieburg, DE
-	Modeling and Design Optimization of a CMOS Compatible MEMS
	L. Latorre, Y. Bertrand, P. Hazard, F. Pressecq and P. Nouet
	LIRMM-CNRS, FR
-	Simulation of Nonideal Behaviour in Integrated Piezoresistive Silicon Pressure Sensors
	W. Romes, J. Muchow, S. Finkbeiner, J. Franz, O. Schatz and H-P. Trah
	Robert Bosch GmbH, DE
-	Analytical Simulation of a 1D Single Crystal Silicon Electrostatic Micromirror
	H. Camon, F. Larnaudie, F. Rivoirard and B. Jammes
	LAAS-CNRS, FR
-	Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs
	S. Iyer, Y. Zhou and T. Mukherjee
	Carnegie Mellon University, US
-	Modeling Approach for CVD-Diamond Based Mechanical Structures
	P. Schmid, M. Adamschik, S. Ertl, P. Gluche and E. Kohn
	University of Ulm, DE
-	A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor
	W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer
	Sandia National Laboratory, US
-	Modeling of SiC Lateral Resonant Devices Over a Broad Temperature Range
	R.G. DeAnna, S. Roy, C.A. Zorman and M. Mehregany
	US Army Research Laboratory, US
-	3-D Finite Element Modeling Schemes for Design and Simulation of VR Microactuator
	A. Mohamed and M. El-Hagry
	Electronics Research Institute, EG
ISBN:	0-9666135-4-6
Pages:	697
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