Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 16: Applications: Microfluidics

Coupled Fluid-Thermal-Structural Simulations in Microvalves and Microchannels

Authors:M.M. Athavale, H.Q. Yang and A.J. Przekwas
Affilation:CFD Research Corporation, US
Pages:570 - 573
Keywords:coupled field simulation, fluid, thermal, structural, microvalves, microchannels
Abstract:This paper presents the results of high-fidelity, 3-D simulations of coupled flow, heat-transfer and structural mechanics simulations of microchannels, micropumps, microvalves, and time-accurate simulations of a microoscillator. In each of these cases, the simulated results were compared with experimental and/or other published data, with excellent agreement. These results demonstrate the capabilities, accuracy and speed of the simulation tools for predictions of coupled, complex multi-physics processes in MEMS devices and their utility during the design phases of these devices for optimization and performance prediction.
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