MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Yield and Reliability Chapter 14

Strength Prediction for MEMS Components Transferring Large Loads

Authors: L-H. Chu, Q. Chen and G.P. Carman

Affilation: University of California, Los Angeles, United States

Pages: 487 - 490

Keywords: strength prediction, microridge, stress converge

Abstract:
In this paper the authors present a new strength criteria combined with a finite element analysis to predict the strength of MEMS fabricated microridges. The single crystal silicon microridges can be manufactured by various processes that produce different geometries with distinctly different strengths, a topic verified by experiments. A strength criteria based on strain energy concepts is proposed to evaluate the difference observed in component strength. Agreement between test data and model prediction is good with errors less than 25% and usually less than 5%. Therefore, we believe that a wide range of microcomponent strengths can be predicted by performing a limited number of tests.

Strength Prediction for MEMS Components Transferring Large Loads

ISBN: 0-9666135-4-6
Pages: 697