Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 14: Yield and Reliability

Strength Prediction for MEMS Components Transferring Large Loads

Authors:L-H. Chu, Q. Chen and G.P. Carman
Affilation:University of California, Los Angeles, US
Pages:487 - 490
Keywords:strength prediction, microridge, stress converge
Abstract:In this paper the authors present a new strength criteria combined with a finite element analysis to predict the strength of MEMS fabricated microridges. The single crystal silicon microridges can be manufactured by various processes that produce different geometries with distinctly different strengths, a topic verified by experiments. A strength criteria based on strain energy concepts is proposed to evaluate the difference observed in component strength. Agreement between test data and model prediction is good with errors less than 25% and usually less than 5%. Therefore, we believe that a wide range of microcomponent strengths can be predicted by performing a limited number of tests.
Strength Prediction for MEMS Components Transferring Large LoadsView PDF of paper
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