Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 14: Yield and Reliability

A Simple VLSI Spherical Particle-Induced Yield Predictor

Authors:K. Nakamae, H. Ohmori and H. Fujioka
Affilation:Osaka University, JP
Pages:479 - 482
Keywords:yield predictor, integrated circuit manufacturing, simulation, particle-induced yield
Abstract:A simple VLSI particle-induced yield predictor has been developed that allows us to predict the entire yield of VLSI and also to analyze the bottleneck processing steps and faults. Particles with spherical shape are generated in the production equipment for each VLSI processing step and are deposited on the wafer. The yield predictor accepts as inputs (a) layout description of the VLSI under analysis in GDS II format, (b) production flow data, (c) planned layer thickness data, and (d) particle parameters for each production equipment. The predictor was applied to 16Mbit DRAM to show its validity.
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