Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 13: Metallization Modeling

Modeling Nucleation and Growth of Voids During Electromigration

Authors:D. Richards, J.B. Adams and L.J. Borucki
Affilation:Arizona State University, US
Pages:471 - 474
Keywords:electromigration, void nucleation, void growth
Abstract:We calculate the formation energy of small voids in Al and Cu, both at the bulk and at grain boundaries, using the Embedded Atom Method. Then, we use those results as input to a Kinetic Monte Carlo model of void nucleation and growth in Al interconnects. Preliminary test cases of the Monte Carlo model are discussed.
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