MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Metallization Modeling Chapter 13

Modeling Facet Growth of Cu Thin Films

Authors: Z. Wang, Y. Li and J.B. Adams

Affilation: Arizona State University, United States

Pages: 455 - 458

Keywords: kinetic lattice Monte Carlo simulation, thin film growth, Cu

Abstract:
We present a Kinetic Lattice Monte Carlo (KLMC) model, which describes deposition, surface self-diffusion, nucleation, and film growth on fcc metal substrates. The activation energies for diffusion are calculated using embedded-atom method (EAM). Using this model, we determine the relative growth rates of (100), (110) and (111) facets as a function of substrate temperature, deposition rate and facet size.

Modeling Facet Growth of Cu Thin Films

ISBN: 0-9666135-4-6
Pages: 697