Modeling Facet Growth of Cu Thin Films

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 13: Metallization Modeling
	Modeling Facet Growth of Cu Thin Films
Authors:	Z. Wang, Y. Li and J.B. Adams
Affilation:	Arizona State University, US
Pages:	455 - 458
Keywords:	kinetic lattice Monte Carlo simulation, thin film growth, Cu
Abstract:	We present a Kinetic Lattice Monte Carlo (KLMC) model, which describes deposition, surface self-diffusion, nucleation, and film growth on fcc metal substrates. The activation energies for diffusion are calculated using embedded-atom method (EAM). Using this model, we determine the relative growth rates of (100), (110) and (111) facets as a function of substrate temperature, deposition rate and facet size.
	View PDF of paper
ISBN:	0-9666135-4-6
Pages:	697
Up