Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
 
Chapter 13: Metallization Modeling
 

Modeling Facet Growth of Cu Thin Films

Authors:Z. Wang, Y. Li and J.B. Adams
Affilation:Arizona State University, US
Pages:455 - 458
Keywords:kinetic lattice Monte Carlo simulation, thin film growth, Cu
Abstract:We present a Kinetic Lattice Monte Carlo (KLMC) model, which describes deposition, surface self-diffusion, nucleation, and film growth on fcc metal substrates. The activation energies for diffusion are calculated using embedded-atom method (EAM). Using this model, we determine the relative growth rates of (100), (110) and (111) facets as a function of substrate temperature, deposition rate and facet size.
Modeling Facet Growth of Cu Thin FilmsView PDF of paper
ISBN:0-9666135-4-6
Pages:697
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