MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Semiconductor Device Modeling Chapter 12

Self Aligned Gate JFETs for Smart MEMS

Authors: S. Amon, D. Vrtacnik, D. Resnik, D. Krizaj, U. Aljancic and A. Levstek

Affilation: University of Ljubljana, Slovenia

Pages: 435 - 438

Keywords: JFET, self aligned gate, device isolation, smart sensors, MEMS

Self Aligned Gate JFET (SJFET) devices and circuits are reported. The problem of electrical isolation between devices on the same chip is realized through Self Aligned Gate approach, enabling the application of standard bipolar discrete device technology (no epitaxy etc.). SJFET structures and circuits are analyzed by 2D numerical device simulation. SJFET differential amplifier circuit modeling is reviewed as an example. On the basis of modeling, test SJFET structures were designed and fabricated. Measurements on test SJFET structures reveale reasonable agreement with modeling.

Self Aligned Gate JFETs for Smart MEMS

ISBN: 0-9666135-4-6
Pages: 697