Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 1: Plenary lectures

Fast Algorithms For 3-D Simulation

Authors:J.K. White
Affilation:Massachusetts Institute of Technology,, US
Pages:1 - 3
Keywords:Integral Equations, Fast Solvers
Abstract:One difficulty associated with computer simulation of micromachined devices is that the devices are typically geometrically complicated and innately three-dimensional. For this reason, attempts to exploit existing finite-element based tools for micromachined device simulation has proved difficult. Instead, micromachine device designers have been early adopters of the recently developed accelerated boundary-element methods. In this short paper the author will describe a little of the history of these methods, primarily to point the interested reader to the relevant literature.
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