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 | MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 8: Software Systems and Tools |
| | An Environment for MEMS Design and Verification | | Authors: | S.F. Bart, N.R. Swart, M. Mariappan, M.H. Zaman and J.R. Gilbert | | Affilation: | Microcosm Technologies, Inc., U.S.A. | | Pages: | 386 - 391 | | Keywords: | ems, CAD, MEMS, MST, FEM | | Abstract: | A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible design includino parameterized-cell layout generation. Lumped parameter macro-models can be generated automatically from 3-D, static, FEM/BEM based device simulations The software environment also provides error checking between different design views. The design environment is illustrated using a differential capacitive-based accelerometer as an example. Efficient, dynamic simulations of this large example system with models based on true,-D device behavior are shown. |  | View paper | | ISBN: | 0-96661-35-0-3 |
| Pages: | 678 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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