MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Software Systems and Tools Chapter 8

Layout Verification Tools for MEMS Physical Design

Authors: K. Hahn, R. Brück and B. Reusch

Affilation: Universitat Dortmund, Germany

Pages: 368 - 373

Keywords: micro svstem design, design verification, process validation. internet-based design tools

The impact of technoloDy related issues in microsystem physica] design is of hiah relevance due to the fact that mask layout and process configuration are strongly interdependant. Performing physical design in this area therefore means designing the layout of mask structures as well as an appropriate process step sequence for fabrication. Unlike in other areas of engineering the design verification task is not sufficiently supported by CAD tools today. This paper describes an approach providing software tools that enable the designer to arrange and to optimize process flows, to derive consistent design rules and to check layout designs for the specific technology intended to be used for fabrication. The tools can be accessed via the Internet. In this manner net based training and design for microsystems is possible, a feature that is especially relevant for SMEs in this field of business.

Layout Verification Tools for MEMS Physical Design

ISBN: 0-96661-35-0-3
Pages: 678