Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 8: Software Systems and Tools

SEGS: On-line WWW Etch Simulator

Authors:G. Li, T. Hubbard and E.K. Antonsson
Affilation:Daltech-Dalhousie University, CA
Pages:356 - 361
Keywords:MEMS, micromachines, silicon, simulations, etching.
Abstract:This paper presents an interactive on-line wet etch simulator (SEGS) which predicts the etched shape as a function of time for arbitrary isotropic or anisotropic etchants and any initial mask shape. Using any Javaenabled web browser users can draw initial masks, choose the etchant, simulate the etching, and view animation results. SEGS can be accessed at
SEGS: On-line WWW Etch SimulatorView PDF of paper
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