Authors: O. Sigmund
Affilation: Technical University of Denmark, Denmark
Pages: 350 - 355
Keywords: actuators, microelectromechanical systems, MEMS, topology optimization, finite element analysis
Design methods for MicroElectroMechanical Svstems (MEMS) have, until now, typically been based on intuition, experience and triai and error approaches. A method which may be used to design mechanical and electromechanical coupling parts of MEMS in a systematic way is the topology optimization method. In this paper, the method is applied to the design of electrothermomechanical microactuators. The topology optimization method is a numerical procedure that distributes one or more passive or active materials in a design domain, such that some output performance is optimized. Here. the output work performed on a workpiece of given stiffness is to be maximized with a constraint on the minimum value of the resistance. One example shows how an optimal actuator lavout is dependent on geometry of the design domain and on the minimum allowable resistance of the device. Another example demonstrates the systematic design of an xy-scanning device with zero cross-sensitivity.