Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Chapter 8:

Software Systems and Tools

-Design Optimization of Microsystems
 H. Eggert, H. Guth, W. Jakob, S. Meinzer, I. Sieber and W. Süß
 Institut fur Angewandte Informatik, DE
-Systematic Design of Electrothermomechanical Microactuators using Topology Optimization
 O. Sigmund
 Technical University of Denmark, DK
-SEGS: On-line WWW Etch Simulator
 G. Li, T. Hubbard and E.K. Antonsson
 Daltech-Dalhousie University, CA
-Computer Aided Modeling of Static and Dynamic Transfer Characteristics
 M. Anton, S. Bechtold, O. Nüssen and R. Laur
 University of Bremen, DE
-Layout Verification Tools for MEMS Physical Design
 K. Hahn, R. Brück and B. Reusch
 Universitat Dortmund, DE
-Simulating 3-Dimensional Deep X-ray Lithography Using the CXrL Toolset
 G. Aigeldinger, B. Craft and W. Menz
 Louisiana State University, US
-Autonomous Agents Design for Digital Network Maximization in Joint C4I System
 M.W. DaBose and L. Luqi
 Naval Postgraduate School, US
-An Environment for MEMS Design and Verification
 S.F. Bart, N.R. Swart, M. Mariappan, M.H. Zaman and J.R. Gilbert
 Microcosm Technologies, Inc., US
-Multi-Mode Sensitive Layout Synthesis of Microresonators
 S. Iyer, T. Mukherjee and G.K. Fedder
 Carnegie Mellon University, US
-DOPDEES/PMM: A System for Portable Model Description
 A.H. Gencer and S.T. Dunham
 Boston University, US
-FELLINI-A CAD Tool for the Design of Microsystems
 M. Lang and M. Glesner
 Darmstadt University of Technology, DE
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