Nano Science and Technology Institute
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Chapter 8:

Software Systems and Tools

-Design Optimization of Microsystems
 H. Eggert, H. Guth, W. Jakob, S. Meinzer, I. Sieber and W. Süß
 Institut fur Angewandte Informatik, Germany
-Systematic Design of Electrothermomechanical Microactuators using Topology Optimization
 O. Sigmund
 Technical University of Denmark, Denmark
-SEGS: On-line WWW Etch Simulator
 G. Li, T. Hubbard and E.K. Antonsson
 Daltech-Dalhousie University, Canada
-Computer Aided Modeling of Static and Dynamic Transfer Characteristics
 M. Anton, S. Bechtold, O. Nüssen and R. Laur
 University of Bremen, Germany
-Layout Verification Tools for MEMS Physical Design
 K. Hahn, R. Brück and B. Reusch
 Universitat Dortmund, Germany
-Simulating 3-Dimensional Deep X-ray Lithography Using the CXrL Toolset
 G. Aigeldinger, B. Craft and W. Menz
 Louisiana State University, U.S.A.
-Autonomous Agents Design for Digital Network Maximization in Joint C4I System
 M.W. DaBose and L. Luqi
 Naval Postgraduate School, U.S.A.
-An Environment for MEMS Design and Verification
 S.F. Bart, N.R. Swart, M. Mariappan, M.H. Zaman and J.R. Gilbert
 Microcosm Technologies, Inc., U.S.A.
-Multi-Mode Sensitive Layout Synthesis of Microresonators
 S. Iyer, T. Mukherjee and G.K. Fedder
 Carnegie Mellon University, U.S.A.
-DOPDEES/PMM: A System for Portable Model Description
 A.H. Gencer and S.T. Dunham
 Boston University, U.S.A.
-FELLINI-A CAD Tool for the Design of Microsystems
 M. Lang and M. Glesner
 Darmstadt University of Technology, Germany
ISBN:0-96661-35-0-3
Pages:678
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