MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Software Systems and Tools Chapter 8

Design Optimization of Microsystems
H. Eggert, H. Guth, W. Jakob, S. Meinzer, I. Sieber and W. Süß
Institut fur Angewandte Informatik, DE

Systematic Design of Electrothermomechanical Microactuators using Topology Optimization
O. Sigmund
Technical University of Denmark, DK

SEGS: On-line WWW Etch Simulator
G. Li, T. Hubbard and E.K. Antonsson
Daltech-Dalhousie University, CA

Computer Aided Modeling of Static and Dynamic Transfer Characteristics
M. Anton, S. Bechtold, O. Nüssen and R. Laur
University of Bremen, DE

Layout Verification Tools for MEMS Physical Design
K. Hahn, R. Brück and B. Reusch
Universitat Dortmund, DE

Simulating 3-Dimensional Deep X-ray Lithography Using the CXrL Toolset
G. Aigeldinger, B. Craft and W. Menz
Louisiana State University, US

Autonomous Agents Design for Digital Network Maximization in Joint C4I System
M.W. DaBose and L. Luqi
Naval Postgraduate School, US

An Environment for MEMS Design and Verification
S.F. Bart, N.R. Swart, M. Mariappan, M.H. Zaman and J.R. Gilbert
Microcosm Technologies, Inc., US

Multi-Mode Sensitive Layout Synthesis of Microresonators
S. Iyer, T. Mukherjee and G.K. Fedder
Carnegie Mellon University, US

DOPDEES/PMM: A System for Portable Model Description
A.H. Gencer and S.T. Dunham
Boston University, US

FELLINI-A CAD Tool for the Design of Microsystems
M. Lang and M. Glesner
Darmstadt University of Technology, DE


ISBN: 0-96661-35-0-3
Pages: 678