Authors: N. Zhou, J.V. Clark and K.S.J. Pister
Affilation: UC-Berkeley, United States
Pages: 308 - 313
Keywords: MEMS, SUGAR, nodal analysis, nonlinear model, Matlab
This paper presents the development of a simulation program (SUGAR) for planar MEMS devices. The approach is based on nodal analysis to solve coupled nonlinear differential equations. The current version SUGAR vO.5 can perform DC, steady state, and transient analysis. It is implemented in Matlab  and the accuracy of the prop,ram is comparable with analytical solutions, experimental data and FEM simulations. The preliminary work shows that this approach could lead to an accurate, fast, and high-level simulation package for MEMS.