 | MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Discretization, Numerics, Computational Efficiency |
A Mixed Rigid/Elastic Formulation for an Efficient Analysis of Electromechanical Systems | |
| Authors: | D. Ramaswamy, N.R. Aluru and J.K. White |
| Affilation: | Massachusetts Institute of Technology, US |
| Pages: | 304 - 307 |
| Keywords: | MEMS, rigid, electromechanical, coupled, simulation |
| Abstract: | In this paper we describe both how to extract rigid bodies given an input file of elements, and how to efficiently construct and solve the rigid-elastic system of equations. Results are given to demonstrate that on a typical comb drive problem, our efficiently implemented mixed rigid-elastic simulator is more than 300 times faster than a purely elastic simulator. TVe also demonstrate that the mixed-regime simulator can be used as part of a coupled-domain simulator to perform 3-D electromechanical analysis of an entire comb drive in under ten minutes. |
 | View PDF of paper |
| ISBN: | 0-96661-35-0-3 |
| Pages: | 678 |
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