Authors: H. Krassow, M. Zabala, A. Götz and C. Cané
Affilation: Centro Nacional de Microelectronica, Spain
Pages: 329 - 333
Keywords: CMOS integrated pressure sensor, finite element simulation, electrical network simulation, computational fluid dynamics, micro-system optimization.
The FEM (Finite Element Method) package ANSYS includin`, the CFD (Computational Fluid Dynamics) module FLOTRAN was coupled with the electrical network simulator HSPICE for the comprehensive design of microsystems. The coupling permits the simultaneous optimization of geometrical, mechanical and electrical design parameters of a micro-electromechanical system. The usefulness of the coupling is demonstrated by the numerical simulation of a pressure-based water flow rate meter. The device fabricated comprises a flow restriction element with incorporated piezoresistive silicon pressure sensor with on-chip circuitry, which was automatically optimized towards the desired output signal using ANSYS design optimization tools.