Authors: H-P Lien, T.G. Wiegele, L. Bomholt and R. Ruhl
Affilation: Integrated Systems Engineering AG, Switzerland
Pages: 325 - 328
Keywords: accelerometer, iMEMS, TCAD, self-consistent electromechanical device simulation
Micro-electro-mechanical systems equipped with active devices (iMEMS) are commonly employed in sensor applications. In this paper, simulation of the mechanical and electrical properties of a deformable structure containing an integrated MOS sensor is described.