MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Discretization, Numerics, Computational Efficiency Chapter 7

Coupled Electro-Mechanical Simulation of Integrated Micro-Electro-Mechanical Systems

Authors: H-P Lien, T.G. Wiegele, L. Bomholt and R. Ruhl

Affilation: Integrated Systems Engineering AG, Switzerland

Pages: 325 - 328

Keywords: accelerometer, iMEMS, TCAD, self-consistent electromechanical device simulation

Abstract:
Micro-electro-mechanical systems equipped with active devices (iMEMS) are commonly employed in sensor applications. In this paper, simulation of the mechanical and electrical properties of a deformable structure containing an integrated MOS sensor is described.

Coupled Electro-Mechanical Simulation of Integrated Micro-Electro-Mechanical Systems

ISBN: 0-96661-35-0-3
Pages: 678