Francais O., Dufour I.
LISiR-URA-CNRS, FR
Keywords: deflection, diaphragm. pneumatic. electrostatic
In this paper, an approximate analytical solution is presented for the diaphragm’s deflection based on energ minimization. through the use of a polynomial solution technique. Thanks to this method. we obtain not onlY the center deflection. but also the enbre position under pneumatic pressure. therebv making it possible to compute the diaphragm’s deflected voiume. Regarding the geometrical and phvsical parameters. three cases can be distinguished, N`’ith the diaphragm: acting as a pure plate. acting as a p. re membrane, or exhibiting the effects of both t.he elastic rigiditv and the initial internal stress. For these three cases. a standardization of the diaphragm’s behavior enables obtaining an abacus that can then be used for any geometrical or physical parameter. In order to validate this approach. some comparisons with other methods are performed. This energ -based approach has been extended to electrostatic actuation and yields more general results than do other more classical methods (i.e., the spring model). Lastly a behavioral comparison of both the membrane and plate cases is presented for a conformable mirror with electrostatic actuation.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 298 - 303
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3