Authors: R.E. Rudd and J.Q. Broughton
Affilation: SFA, Inc., United States
Pages: 287 - 291
Keywords: molecular dynamics, atomistic simulation, silicon resonator, coupling of length scales, MEMS
We simulate the dynamic and temperature dependent behavior of two different Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this simulation accurately model the behavior of the mechanical components of MEMS down to the atomic scale, by combining the power of an atomistic simulation with the efficiency of finite elements. This work studies the dynamics of a silicon micro-gear train and the vibrational behavior of a micron-scale quartz oscillator. The world provides a new paradigm for device design and prediction, and for the relevance of atomistic simulation.