MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Discretization, Numerics, Computational Efficiency Chapter 7

A Fast Integral Equation Technique for Analysis of Microflow Sensors Based on Drag Force Calculations
N.R. Aluru and J.K. White
Massachusetts Institute of Technology, US

Coupling of Length Scales and Atomistic Simulation of a MEMS Device
R.E. Rudd and J.Q. Broughton
SFA, Inc., US

Automated Solid Model Extraction for MEMS Visualization
D.L. DeVoe, S.B. Green and J.M Jump
University of Maryland, US

Energy-Based Solution Method for the Global Behavior of Diaphragms Under Pneumatic and Electrostatic Pressure
O. Francais and I. Dufour
LISiR-URA-CNRS, FR

A Mixed Rigid/Elastic Formulation for an Efficient Analysis of Electromechanical Systems
D. Ramaswamy, N.R. Aluru and J.K. White
Massachusetts Institute of Technology, US

Nodal Analysis for MEMS Design Using SUGAR v0.5
N. Zhou, J.V. Clark and K.S.J. Pister
UC-Berkeley, US

Implications of Finite Time Stepping for Transient Sensor Models
M. Schubert and B. González
Fachhochschule Regensburg, DE

Coupling of FEM Programs for Simulation of Complex Systems
B. Krevet and W. Kaboth
Forschungszentrum Karlsruhe, DE

Coupled Electro-Mechanical Simulation of Integrated Micro-Electro-Mechanical Systems
H-P Lien, T.G. Wiegele, L. Bomholt and R. Ruhl
Integrated Systems Engineering AG, CH

MEMS Design Optimization Using Coupled FEM and Electrical Circuit Simulation
H. Krassow, M. Zabala, A. Götz and C. Cané
Centro Nacional de Microelectronica, ES

A 3D Mesh Generation Method for the Simulation of Semiconductor Processes and Devices
K. Lilja, V. Moroz and D. Wake
Technology Modeling Associates, Inc., US

Dispersive Media in FDTD-Comparison of Recursive Convolution and Auxiliary Differential Equation Methods
T.O. Körner and W. Fichtner
ETH-EPFL, CH


ISBN: 0-96661-35-0-3
Pages: 678