| |
 | MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Equivalent Circuits, Behavioral and Multilevel Simulation |
| | Modeling and Simulation of a Stiffness-Controlled Micro-Bridge Resonator | | Authors: | F. Verjus, T. Bourouina, E. Belhaire, N. Mauduit and A. Bosseboeuf | | Affilation: | IEF-CNRS, France | | Pages: | 251 - 256 | | Keywords: | resonator, buckling, FEM analysis, HDLA, multi-level simulation | | Abstract: | This paper deals with the modelin and simulation of electrical stiffness control of a micro-bridge. Stiffness variations are obtained by compressive stresses that result from Joule heating. The micro-bridge is slaved to resonance in order to control its stiffness through its resonance frequency. This is carried-out in a PLL-based circuit in which the mechanical resonator acts as a VCO. Multi-level simulations have been achieved. A first-order analytical model of the micro-bridge has been set on the basis of approximations. Then, FEM simulations have been performed and used to build a refined model. The microbridge models have been implemented in HDLA language for the ELDO simulator. Finally, a system-level simulation has been used to analyze the behavior of the whole system, which includes the micro-bridge resonator linked with other electrical components. |  | View paper | | ISBN: | 0-96661-35-0-3 |
| Pages: | 678 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
|
| Upcoming Events |
 |
 |
 |
 |
| nanoPRwire™ |
 |
| News Headlines |
 |
|
|
| |
| |
|
| | |
| |
|
|
