Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
 
Chapter 6: Equivalent Circuits, Behavioral and Multilevel Simulation
 

Simulation of Electrothermal MOS Circuits Using Saber

Authors:C.C. Liu, E.T. Carlen, K.D. Wise and C.H. Mastrangelo
Affilation:University of Michigan, US
Pages:239 - 244
Keywords:electrothermal modeling
Abstract:In this paper we present a simple methodology for simulating small to medium sized circuits where electrical and thermal equations are solved simultaneously using Saber, a commercial, general purpose simulator. Dynamic electrothermal models have been developed representing both metal oxide semiconductor (MOS) and bipolar junction transistor (BJT) devices. The electrothermal models are then employed in the simulation of an infrared detector circuit, and a thermally isolated, suspended plate voltage controlled oscillator. Simulated results are compared to measured results taken from fabricated devices and systems. In all comparisons, the simulated data is in good agreement with experimental data.
Simulation of Electrothermal MOS Circuits Using SaberView PDF of paper
ISBN:0-96661-35-0-3
Pages:678
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