MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multilevel Simulation Chapter 6

Network-Type Modeling of Micromachined Sensor Systems

Authors: G. Lorenz and R. Neul

Affilation: Robert Bosch GmbH, Germany

Pages: 233 - 238

Keywords: MEMS, network-type modeling, spatial beam model, SABER, MAST, general motion

Abstract:
This paper describes the development of networktype models for the simulation of micromechanical components such as spatial beams and masses. The models were coded in MASTÆ for the SABERÆ simulator and their accuracy was compared to analytical solutions and FEM simulations using ANSYSÆ. This approach leads to a library of network-type multi domain component models for the system simulation of MEMS, providing nearly FEM accuracy at network-type simulation speed.

Network-Type Modeling of Micromachined Sensor Systems

ISBN: 0-96661-35-0-3
Pages: 678