Authors: S. Pal Chaudhury, D. Winick and P. Franzon
Affilation: North Carolina State University, United States
Pages: 278 - 282
Keywords: Hspice, Memcad, static parameter extraction, dynamic electrical equivalent
This paper introduces a novel approach of accurately modeling electrostatically actuated MEMS structures, using a lumped parameter electrical analogy based on voltage controlled de.es in Spice. This analysis takes into account the changes in capacitive force and squeeze film damping because of movement of the structures, by modeling them by voltage controlled devices in Spice. The value of the spring constant and the capacitance, as a function of airgap between parallel plates is derived from commercially available CAD tools by static analysis of the MEMS structures. The speed of actuation and movement of the electrostatic MEMS devices, on applying a pulse voltage is simulated using HSpice. This paper provides a way of cosimulating digital, analog and sensor/actuator parts put together, on a single System on a chip.