Authors: C. Cojocaru, P. Lerch, B. Kloeck, C. Bourgeois and Ph. Renaud
Affilation: EPFL, Switzerland
Pages: 273 - 277
Keywords: dynamic simulation, microshutter, modeling, electromechanical coupling
A code for the dynamical simulation of electrostatic actuated micromechanical systems with complex 3D geometry was created. It allows exact electrical force computation at each time step during the dynamic analyses. A finite element method is used to extract the mode shape matrix and the resonance frequency. A boundary element method is used to compute the electrostatic force distribution. The linear normal mode summation method is used for dynamic characterization of the microdevices. In order to test the present code, it is applied to the simulation of an optical microshutter.