System Level Simulation of a Digital Accelerometer

	MSM 98 Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems Chapter 6: Equivalent Circuits, Behavioral and Multilevel Simulation
	System Level Simulation of a Digital Accelerometer
Authors:	M. Kraft and C.P. Lewis
Affilation:	Coventry University, UK
Pages:	267 - 272
Keywords:	micromachining, accelerometer, sigma-delta-modulation, simulation
Abstract:	This paper describes the derivation of a detailed model of a micromachined accelerometer and its implementation in a commercial SPICE package. The sensing element is modeled at a system level, the control and interface electronics at a component level. The SPICE simulation allows very realistic insight into the system behavior, however, the simulation time is considerable long.
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ISBN:	0-96661-35-0-3
Pages:	678
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