Authors: M. Kraft and C.P. Lewis
Affilation: Coventry University, United Kingdom
Pages: 267 - 272
Keywords: micromachining, accelerometer, sigma-delta-modulation, simulation
This paper describes the derivation of a detailed model of a micromachined accelerometer and its implementation in a commercial SPICE package. The sensing element is modeled at a system level, the control and interface electronics at a component level. The SPICE simulation allows very realistic insight into the system behavior, however, the simulation time is considerable long.