Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Equivalent Circuits, Behavioral and Multilevel Simulation

System Level Simulation of a Digital Accelerometer

Authors:M. Kraft and C.P. Lewis
Affilation:Coventry University, UK
Pages:267 - 272
Keywords:micromachining, accelerometer, sigma-delta-modulation, simulation
Abstract:This paper describes the derivation of a detailed model of a micromachined accelerometer and its implementation in a commercial SPICE package. The sensing element is modeled at a system level, the control and interface electronics at a component level. The SPICE simulation allows very realistic insight into the system behavior, however, the simulation time is considerable long.
System Level Simulation of a Digital AccelerometerView PDF of paper
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