MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multilevel Simulation Chapter 6

System Level Simulation of a Digital Accelerometer

Authors: M. Kraft and C.P. Lewis

Affilation: Coventry University, United Kingdom

Pages: 267 - 272

Keywords: micromachining, accelerometer, sigma-delta-modulation, simulation

This paper describes the derivation of a detailed model of a micromachined accelerometer and its implementation in a commercial SPICE package. The sensing element is modeled at a system level, the control and interface electronics at a component level. The SPICE simulation allows very realistic insight into the system behavior, however, the simulation time is considerable long.

System Level Simulation of a Digital Accelerometer

ISBN: 0-96661-35-0-3
Pages: 678