Papers:
Simulation of Mixed-Signal Systems in Standard VHDL
Historically, the analogue and digital parts of a hardware design have been modelled and simulated in different environments and could not be combined in a single simulator. On the other hand, if a design contains [...]
Network-Type Modeling of Micromachined Sensor Systems
This paper describes the development of networktype models for the simulation of micromechanical components such as spatial beams and masses. The models were coded in MASTÆ for the SABERÆ simulator and their accuracy was compared [...]
Simulation of Electrothermal MOS Circuits Using Saber
In this paper we present a simple methodology for simulating small to medium sized circuits where electrical and thermal equations are solved simultaneously using Saber, a commercial, general purpose simulator. Dynamic electrothermal models have been [...]
Dynamic Modelling and Simulation of Microelectromechanical Devices with a Circuit Simulation Program
Simulation blocks of micromechanical sensors and actuators modelling their dynamic electromechanical and fluidic operation are presented. Due to the electrical equivalent circuit realization the sensor system simulations in the frequency and time domains are possible. [...]
Modeling and Simulation of a Stiffness-Controlled Micro-Bridge Resonator
This paper deals with the modelin and simulation of electrical stiffness control of a micro-bridge. Stiffness variations are obtained by compressive stresses that result from Joule heating. The micro-bridge is slaved to resonance in order [...]
Spice-like Simulation Using Real Devices Instead of their Mathematical Models
Modern Spice-like circuit simulators use increasingly accurate and sophisticated analytical models of components. But the validity of models, that is the probability that the procedure of the model verification is true, still remains very poor. [...]
Electrical Analogue of Capacitive Force-Balanced Accelerometer Used in HSPICE Simulator
Analyzing mechanism of accelerometer, electrical analogue of capacitive force-balanced accelerometer used in HSPICE simulator has been developed. Comparing to the former equivalent circuit, we use acceleration instead of displacement as input variable. Thus we can [...]
System Level Simulation of a Digital Accelerometer
This paper describes the derivation of a detailed model of a micromachined accelerometer and its implementation in a commercial SPICE package. The sensing element is modeled at a system level, the control and interface electronics [...]
Complete Transient Simulations of Electrostatic Actuators
A code for the dynamical simulation of electrostatic actuated micromechanical systems with complex 3D geometry was created. It allows exact electrical force computation at each time step during the dynamic analyses. A finite element method [...]
Accurate Lumped-Parameter modeling for Dynamic Simulation of Electrostatic MEMS Actuators
This paper introduces a novel approach of accurately modeling electrostatically actuated MEMS structures, using a lumped parameter electrical analogy based on voltage controlled de.es in Spice. This analysis takes into account the changes in capacitive [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3