Authors: A. Sulzmann, C. Schütz, H. Hügli and J. Jacot
Affilation: EPFL, Switzerland
Pages: 194 - 198
Keywords: augmented reality, geometric point matching, micro part verification, m -a measurement, 3D microscopy
Presently microsystems are gaining in interest. Microsystems are small, independent modules, incorporating various functions, such as electronic, micro mechanical, data processing, optical, chemical, medical and biological functions. Though improving the manufacturing technologies, the measuring of the small structures to insure the quality of the process is a key information for the successful development. So far strong microscopes are needed to measure the micro structures. The key idea behind our project is to use the intuitiveness and the 3D visualization of VR environments coupled with a 3D vision system to perform measurements and verification of real micro structures at a high 3D accuracy. The direct feedback between real microscope and virtual reality by 3D vision as internal loop enables a realistic visualization of measured and analyzed micro structure data. Future developments will include dynamic 3D measurements for microactuator characterization, automatic modeling and 3D visualization of dynamic behaviors like force sensing in microrobotics.